THE APPLICATION OF THE MONTH! PUMPS FOR THE PRODUCTION OF SEMICONDUCTORS
The supply, circulation, and filtration of high-purity chemicals, many of which are toxic or hazardous, the transfer of sludge and abrasive solvents and the removal and neutralization or reconditioning of wastewater are common applications during semiconductors manufacturing.
Due to their critical nature, the requirements placed on the used pumps to facilitate these liquid transfer operations are high.
With this in mind, two models of ALMATEC Pneumatic Double Diaphragm Pumps (AODD) possess the design features, operational benefits and capabilities to excel in handling high purity chemicals and wastewater during semiconductors manufacturing.
ALMATEC Futur Series
Almatec AODD pumps of the FUTUR series feature a design that allows liquids to flow directly through the product chambers inside the central body; this ensures that only one side of the bodies contacts the liquid, which reduces the number of flow bends to just two, resulting in a minimized surface area.
The ALMATEC FUTUR series special pumps for semiconductors also have no fasteners, such as tie rods and bolts, with a non-contact cascade sealing system between the product chambre, which improves the structural integrity of the pump.
This special design ® allows ALMATEC FUTUR series pumps to excel in handling high purity chemicals and wastewater during semiconductors manufacturing.
Four models are available for different semiconductors manufacturing applications: ALMATEC FUTUR T: corrosion resistance and higher tensile strength for handling acids and caustics - ALMATEC FUTUR H: for high temperature applications involving acids and caustics - ALMATEC FUTUR E: abrasion resistant for handling semiconductors polishing slurries and chemical mechanical planarization (CMP) – ALMATEC FUTUR S/SH: solid full block 316L stainless steel for use with solvent mixes and strippers.
E Series
ALMATEC E-series AODD pneumatic self-priming double diaphragm pumps, introduced to the market in 2009, are based on the legacy of Almatec's original A-series model, recognized as the leading plastic AODD pump since its introduction in 1984.
The new design of ALMATEC E-series pumps includes an innovative clamping ring structure, increased flow capacity, reduced air consumption, reduced noise levels and a pulsation damper suitable for flanged connections.
All of these capabilities combine to make the E-Series pneumatic double diaphragm pumps ideal for use as drain pumps in supply applications and as chemical handling pumps in water/wastewater treatment.
Some features and advantages of the ALMATEC E series pneumatic double diaphragm pumps are: robust construction in plastic blocks in conductive PE/PE with high molecular weight or conductive PTFE/PTFE, diaphragms made of EPDM, compound PTFE/EPDM, modified PTFE, NBR or ATEX variants.
Ball valves built in EPDM, PTFE, NBR or stainless steel. Self-priming operation. PERSWING P air control system without lubrication or maintenance. Temperatures up to 120ºC (248ºF).
Expansion compensation for use in applications with fluctuating temperatures.
DIN EN ISO 9001:2008 and DIN ISO 14001:2004 certified ATEX certified.